Shutdown pquest 2002-10-31 14:38:21: wafer stuck in etching chamber

huac at snf.stanford.edu huac at snf.stanford.edu
Thu Oct 31 02:38:22 PST 2002


I run O2 cleaning with my first wafer, I can't unload the wafer after finish the run, I would like to continue mt etching process development today, please help.  Thank you!
Hua




More information about the pquest-pcs mailing list