From cbaxter at snf.stanford.edu  Wed Sep  4 08:32:50 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sep 4, 2002 8:32:50 PM
Subject: Shutdown pquest 2002-08-27 15:57:47: 
Message-ID: <mailman.222.1357938560.25846.pquest-pcs@snf.stanford.edu>

installed new vesple lifter pin and cycled wafer to check
alignment and transport



From hphan at snf.stanford.edu  Thu Sep  5 10:24:39 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Sep 5, 2002 10:24:39 AM
Subject: Comment pquest 2002-09-05 10:24:39: Ran 15min seasoning, everything is good!
Message-ID: <mailman.223.1357938560.25846.pquest-pcs@snf.stanford.edu>




From xjyu at snf.stanford.edu  Thu Sep  5 11:52:35 2002
From: xjyu at snf.stanford.edu (xjyu at snf.stanford.edu)
Date: Sep 5, 2002 11:52:35 PM
Subject: Problem pquest 2002-09-05 23:52:35: Wafer drop broken
Message-ID: <mailman.224.1357938560.25846.pquest-pcs@snf.stanford.edu>

When I start the receipe, the system remind me to load wafer. Then I loaded wafer, but the system didn't transfer the wafer into process chamber and started our receipe. 
I stopped the process, press load wafer, but system gave no response. Then I pressed unload wafer, disaster happened. 



From booth at snf.stanford.edu  Fri Sep  6 06:25:50 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Sep 6, 2002 6:25:50 AM
Subject: Shutdown pquest 2002-09-06 06:25:48: xjyu reported broken wafer 
Message-ID: <mailman.225.1357938560.25846.pquest-pcs@snf.stanford.edu>

This should have been a SHUTDOWN report,
not a problem.



From hphan at snf.stanford.edu  Fri Sep  6 04:13:15 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Sep 6, 2002 4:13:15 PM
Subject: Shutdown pquest 2002-09-06 06:25:48: Remove broken pieces, ran seasoning.
Message-ID: <mailman.226.1357938560.25846.pquest-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Fri Sep  6 04:13:39 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Sep 6, 2002 4:13:39 PM
Subject: Problem pquest 2002-09-05 23:52:35: 
Message-ID: <mailman.227.1357938560.25846.pquest-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Wed Sep 18 06:52:05 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Sep 18, 2002 6:52:05 AM
Subject: Shutdown pquest 2002-09-18 06:52:04: electrical work in basement
Message-ID: <mailman.228.1357938560.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Sep 18 04:41:46 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sep 18, 2002 4:41:46 PM
Subject: Shutdown pquest 2002-09-18 06:52:04: electrical work in basement
Message-ID: <mailman.229.1357938560.25846.pquest-pcs@snf.stanford.edu>

tool is back online



From booth at snf.stanford.edu  Tue Sep 24 07:48:21 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Sep 24, 2002 7:48:21 AM
Subject: Shutdown pquest 2002-09-24 07:48:20: maint.
Message-ID: <mailman.230.1357938560.25846.pquest-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Tue Sep 24 07:49:12 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Sep 24, 2002 7:49:12 AM
Subject: Shutdown pquest 2002-09-24 07:48:20: maint.
Message-ID: <mailman.231.1357938560.25846.pquest-pcs@snf.stanford.edu>

installed Helium leak check valve.