From cbaxter at snf.stanford.edu  Tue Apr  8 06:36:24 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 8, 2003 6:36:24 PM
Subject: Shutdown pquest 2003-04-08 18:36:23: Report Shutdown for pquest
Message-ID: <mailman.295.1357938561.25846.pquest-pcs@snf.stanford.edu>

shutdown for routin maint



From cbaxter at snf.stanford.edu  Tue Apr  8 07:23:30 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 8, 2003 7:23:30 PM
Subject: Shutdown pquest 2003-04-08 18:36:23: Report Clear for pquest
Message-ID: <mailman.296.1357938561.25846.pquest-pcs@snf.stanford.edu>

system is avail



From pickard at snf.stanford.edu  Mon Apr 21 12:35:30 2003
From: pickard at snf.stanford.edu (pickard at snf.stanford.edu)
Date: Apr 21, 2003 12:35:30 AM
Subject: Shutdown pquest 2003-04-21 00:35:30: Report Shutdown for pquest
Message-ID: <mailman.297.1357938561.25846.pquest-pcs@snf.stanford.edu>

pquest is down.  my wafer broke on the chuck.  needs to be removed.  sample can be discarded.  do not worry about retrieving.



From pickard at snf.stanford.edu  Mon Apr 21 12:36:02 2003
From: pickard at snf.stanford.edu (pickard at snf.stanford.edu)
Date: Apr 21, 2003 12:36:02 AM
Subject: Problem pquest 2003-04-21 00:36:01: Report Problem for pquest
Message-ID: <mailman.298.1357938561.25846.pquest-pcs@snf.stanford.edu>

wafer broke on chuck.  cannot use



From booth at snf.stanford.edu  Mon Apr 21 01:26:40 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 21, 2003 1:26:40 PM
Subject: Shutdown pquest 2003-04-21 00:35:30: Report Clear for pquest
Message-ID: <mailman.299.1357938561.25846.pquest-pcs@snf.stanford.edu>

removed wafer from  etch chamber.
removed silicon pieces & globs of kapton tape
from the chuck & Helium O-ring.
Did DI wipedown of chamber lid & walls.
Chamber needs O2 clean & seasoning
before regular processing.



From pickard at snf.stanford.edu  Tue Apr 22 01:42:50 2003
From: pickard at snf.stanford.edu (pickard at snf.stanford.edu)
Date: Apr 22, 2003 1:42:50 PM
Subject: Shutdown pquest 2003-04-22 13:42:49: Report Shutdown for pquest
Message-ID: <mailman.300.1357938561.25846.pquest-pcs@snf.stanford.edu>

samjple fell



From booth at snf.stanford.edu  Tue Apr 22 02:10:34 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 22, 2003 2:10:34 PM
Subject: Shutdown pquest 2003-04-22 13:42:49: Report Clear for pquest
Message-ID: <mailman.301.1357938561.25846.pquest-pcs@snf.stanford.edu>

opened etch chamber & removed carrier wafer
& sample.



From kaimeifu at snf.stanford.edu  Fri Apr 25 11:49:23 2003
From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu)
Date: Apr 25, 2003 11:49:23 AM
Subject: Problem pquest 2003-04-25 11:49:23: Report Problem for pquest
Message-ID: <mailman.302.1357938561.25846.pquest-pcs@snf.stanford.edu>

Forward power indicater on MW power generator is reading high numbers (1500-1600 when set for 400).  The two other MW indicators read the correct value.



From cbaxter at snf.stanford.edu  Fri Apr 25 06:00:54 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 25, 2003 6:00:54 PM
Subject: Problem pquest 2003-04-25 11:49:23: Report Clear for pquest
Message-ID: <mailman.303.1357938561.25846.pquest-pcs@snf.stanford.edu>

reset tool and check  ed, it reading fine