Shutdown pquest 2003-04-21 00:35:30: Report Clear for pquest

booth at snf.stanford.edu booth at snf.stanford.edu
Mon Apr 21 01:26:40 PDT 2003


removed wafer from  etch chamber.
removed silicon pieces & globs of kapton tape
from the chuck & Helium O-ring.
Did DI wipedown of chamber lid & walls.
Chamber needs O2 clean & seasoning
before regular processing.




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