Shutdown pquest 2003-08-02 14:47:53: Report Clear for pquest

booth at snf.stanford.edu booth at snf.stanford.edu
Mon Aug 4 01:19:09 PDT 2003


Opened etch chamber & loadlock & cleaned out
broken carrier wafer.
Used DI water on wipes to clean chamber.
Pumped out for 1 hr, & Gigi did 60 min O2 clean.
REady for seasoning.	Len




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