Shutdown pquest 2003-08-02 14:47:53: Report Clear for pquest

[booth at snf.stanford.edu]

Opened etch chamber & loadlock & cleaned out
broken carrier wafer.
Used DI water on wipes to clean chamber.
Pumped out for 1 hr, & Gigi did 60 min O2 clean.
REady for seasoning.	Len