Shutdown pquest 2003-08-05 13:51:57: Report Shutdown for pquest

sigari at snf.stanford.edu sigari at snf.stanford.edu
Tue Aug 5 01:51:59 PDT 2003


After finishing the process, it is not releasing the wafer. It shows "wait" for the wafer release sensor. My wafer is stuck inside the process chamber. Please remove it carefully and let me know when you take it out.




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