Shutdown pquest 2003-08-16 11:18:55: Report Shutdown for pquest

dhui at snf.stanford.edu dhui at snf.stanford.edu
Sat Aug 16 11:18:56 PDT 2003


dummy wafer crashed, debris on the loading arm and inside 
the chamber.
Was running Oxygen.rcp, while loading the dummy wafer into the chamber, loading arm was still in motion when the wafer 
seemed to have hit something and crashed. 
Waited till the loading arm back at 'home position', and the first 
step of the recipe started, then stopped the recipe, reset system,go idle and sleep. 




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