Shutdown pquest 2003-08-18 06:31:57: Report Clear for pquest
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Aug 18 07:59:49 PDT 2003
vacuum out broken wafer chips and check wafer
transfer. I wafer was misloaded on arm that's why it broke.
chamber has been o2 cleaned
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