Shutdown pquest 2003-08-18 06:31:57: Report Clear for pquest

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Aug 18 07:59:49 PDT 2003


vacuum out broken wafer chips and check wafer
transfer. I wafer was misloaded on arm that's why it broke.
chamber has been o2 cleaned




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