Shutdown pquest 2003-08-27 10:17:16: Report Clear for pquest

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Aug 27 05:44:24 PDT 2003


vented and vacuum out wafer chips. the reason why
the dummy wafer broke, the wafer was not detected
on arm load.  when then wafer was being loaded into the
chamber, the lifter pins was up.




More information about the pquest-pcs mailing list