Shutdown pquest 2003-12-15 16:13:26: Wafer breakage
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Dec 15 22:33:16 PST 2003
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Shutdown pquest 2003-12-15 16:13:26: Wafer breakage
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Shutdown pquest 2003-12-19 11:30:00: Holiday Shutdown
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cleaned up broken wafer chips and wet cleaned chamber
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Shutdown pquest 2003-12-15 16:13:26: Wafer breakage
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Shutdown pquest 2003-12-19 11:30:00: Holiday Shutdown
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