Shutdown pquest 2003-07-13 17:56:16: Report Shutdown for pquest

[mwiemer at snf.stanford.edu]

Doe! wafer broken.  I would like to have it back if possible, the etch finished. :)   You may want to check the o-ring to see that it was not etched. I think the wafer broke on unload, but it is possible (highly unlikely) that it broke during the etch. Backside He would have increased if it broke durring the etch and I would have noticed i think.
 Thanks.
-Mike