Shutdown pquest 2003-07-23 05:13:33: Report Clear for pquest
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Wed Jul 23 11:22:22 PDT 2003
vented chamber. vacuum out pieces of broken wafer chips.
wet cleaned chamber. need to run o2 plasma before running
any recipe
More information about the pquest-pcs
mailing list