From ssun at snf.stanford.edu Wed Jun 4 01:06:20 2003 From: ssun at snf.stanford.edu (ssun at snf.stanford.edu) Date: Jun 4, 2003 1:06:20 PM Subject: Shutdown pquest 2003-06-04 13:06:16: Report Shutdown for pquest Message-ID: Wafer broke while being loaded into the chamber for etching. The three lift pins don't extract back, even there is no wafer on the chuck. Turbo pump has the error message: "E006". Suzy / James From hphan at snf.stanford.edu Wed Jun 4 03:36:51 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jun 4, 2003 3:36:51 PM Subject: Shutdown pquest 2003-06-04 13:06:16: Report Clear for pquest Message-ID: took a look inside and did not see any pieces wafer. ran a test and it works fine. From alirezaa at snf.stanford.edu Mon Jun 9 06:16:19 2003 From: alirezaa at snf.stanford.edu (alirezaa at snf.stanford.edu) Date: Jun 9, 2003 6:16:19 PM Subject: Problem pquest 2003-06-09 18:16:15: Report Problem for pquest Message-ID: 1 - The Cl2 flow rate is stuck at 1.6sccm independent of the setpoint (set at 1 and 3; measured 1.6sccm in both cases) 2 - the SF6 flow rate fluctuates a lot if used simoltaneously with stsetch From booth at snf.stanford.edu Thu Jun 12 09:09:05 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 12, 2003 9:09:05 AM Subject: Problem pquest 2003-06-09 18:16:15: Report Clear for pquest Message-ID: both of the issues that Ali has mentioned are already known. I have offered Ali more detailed info on the performance of the Cl2 MFC, but he has not responded to my e-mail. From gigi at snf.stanford.edu Thu Jun 12 01:43:03 2003 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Jun 12, 2003 1:43:03 PM Subject: Problem pquest 2003-06-12 13:43:03: run out of pages in logbook Message-ID: From hphan at snf.stanford.edu Thu Jun 12 02:34:57 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jun 12, 2003 2:34:57 PM Subject: Problem pquest 2003-06-12 13:43:03: Report Clear for pquest Message-ID: Put it some log sheet. From dfattal at snf.stanford.edu Sat Jun 14 04:48:24 2003 From: dfattal at snf.stanford.edu (dfattal at snf.stanford.edu) Date: Jun 14, 2003 4:48:24 PM Subject: Shutdown pquest 2003-06-14 16:48:23: Report Shutdown for pquest Message-ID: wafer fell off the pins... From booth at snf.stanford.edu Mon Jun 16 12:41:40 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 16, 2003 12:41:40 PM Subject: Shutdown pquest 2003-06-14 16:48:23: Report Clear for pquest Message-ID: opened etch chamber & cleaned up pieces of broken wafer. Next user needs to run 30 min O2 clean & then season chamber for processing. From dfattal at snf.stanford.edu Tue Jun 17 09:56:27 2003 From: dfattal at snf.stanford.edu (dfattal at snf.stanford.edu) Date: Jun 17, 2003 9:56:27 PM Subject: Shutdown pquest 2003-06-17 21:56:26: Report Shutdown for pquest Message-ID: my wafer fell off the pins again !! From cbaxter at snf.stanford.edu Tue Jun 17 11:50:45 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 17, 2003 11:50:45 PM Subject: Shutdown pquest 2003-06-17 21:56:26: Report Clear for pquest Message-ID: wafer did fell, it broke(into small pieces). vacuum out pieces of broken wafer and wet cleaned chamber with ipa and iso From kaimeifu at snf.stanford.edu Tue Jun 24 08:26:25 2003 From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu) Date: Jun 24, 2003 8:26:25 AM Subject: Problem pquest 2003-06-24 08:26:23: Report Problem for pquest Message-ID: This morning came in and found etch chamber pressure 0.1 mTorr instead of 2 mTorr load lock at atm computer screen very dim (can barely see screen) and unrepsonsive to pen From kaimeifu at snf.stanford.edu Tue Jun 24 09:15:58 2003 From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu) Date: Jun 24, 2003 9:15:58 AM Subject: Shutdown pquest 2003-06-24 09:15:55: Report Shutdown for pquest Message-ID: light pen does not work. Machine is not usable. Screen is still dim. From booth at snf.stanford.edu Tue Jun 24 11:36:12 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 24, 2003 11:36:12 AM Subject: Problem pquest 2003-06-24 08:26:23: Report Clear for pquest Message-ID: changed to shutdown From booth at snf.stanford.edu Tue Jun 24 11:36:36 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 24, 2003 11:36:36 AM Subject: Shutdown pquest 2003-06-24 09:15:55: Report Clear for pquest Message-ID: tightened loose connections. From cshen at snf.stanford.edu Tue Jun 24 01:11:19 2003 From: cshen at snf.stanford.edu (cshen at snf.stanford.edu) Date: Jun 24, 2003 1:11:19 PM Subject: Problem pquest 2003-06-24 13:11:18: Report Problem for pquest Message-ID: Display dark. From booth at snf.stanford.edu Tue Jun 24 01:29:27 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 24, 2003 1:29:27 PM Subject: Shutdown pquest 2003-06-24 13:29:26: Report Shutdown for pquest Message-ID: diaplay bad From booth at snf.stanford.edu Thu Jun 26 03:09:07 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 26, 2003 3:09:07 PM Subject: Problem pquest 2003-06-24 13:11:18: Report Clear for pquest Message-ID: changed report to shutdown From booth at snf.stanford.edu Thu Jun 26 03:10:22 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 26, 2003 3:10:22 PM Subject: Shutdown pquest 2003-06-24 13:29:26: Report Clear for pquest Message-ID: replaced failing display with spare used display. Next user needs to run O2 clean, before regular process. From kaimeifu at snf.stanford.edu Mon Jun 30 09:32:15 2003 From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu) Date: Jun 30, 2003 9:32:15 AM Subject: Problem pquest 2003-06-30 09:32:14: indicator error Message-ID: RF reflected watts indicator on MW power generator goes off scale. Forward indicator reads normally, and all other MW indicators read normally. From cbaxter at snf.stanford.edu Mon Jun 30 02:29:27 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 30, 2003 2:29:27 PM Subject: Problem pquest 2003-06-30 09:32:14: Report Clear for pquest Message-ID: top wavegudie display is accurate. bottom display is not real