Shutdown pquest 2003-06-04 13:06:16: Report Shutdown for pquest

ssun at ssun at
Wed Jun 4 01:06:20 PDT 2003

Wafer broke while being loaded into the chamber for etching.
The three lift pins don't extract back, even there is no wafer on the chuck.
Turbo pump has the error message: "E006".
Suzy / James

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