Shutdown pquest 2003-06-04 13:06:16: Report Shutdown for pquest

ssun at snf.stanford.edu ssun at snf.stanford.edu
Wed Jun 4 01:06:20 PDT 2003


Wafer broke while being loaded into the chamber for etching.
The three lift pins don't extract back, even there is no wafer on the chuck.
Turbo pump has the error message: "E006".
Suzy / James




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