Problem pquest 2003-06-09 18:16:15: Report Problem for pquest

alirezaa at snf.stanford.edu alirezaa at snf.stanford.edu
Mon Jun 9 06:16:19 PDT 2003


1 - The Cl2 flow rate is stuck at 1.6sccm independent of the setpoint (set at 1 and 3; measured 1.6sccm in both cases)
2 - the SF6 flow rate fluctuates a lot if used simoltaneously with stsetch




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