Problem pquest 2003-06-24 08:26:23: Report Problem for pquest

kaimeifu at snf.stanford.edu kaimeifu at snf.stanford.edu
Tue Jun 24 08:26:25 PDT 2003


This morning came in and found
etch chamber pressure 0.1 mTorr instead of 2 mTorr
load lock at atm
 computer screen very dim (can barely see screen) and unrepsonsive to pen




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