From raldaz at snf.stanford.edu Thu Mar 6 12:59:44 2003 From: raldaz at snf.stanford.edu (raldaz at snf.stanford.edu) Date: Mar 6, 2003 12:59:44 PM Subject: Comment pquest 2003-03-06 12:59:43: Report Comment for pquest Message-ID: The pin closer to load-lock and back is higher that the other two tilting the wafer while loading. Loading can still be done correctly. From cbaxter at snf.stanford.edu Thu Mar 6 05:55:11 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 6, 2003 5:55:11 PM Subject: Shutdown pquest 2003-03-06 17:55:10: Report Shutdown for pquest Message-ID: need to check on lifter pin problem that was reported earlier today From cbaxter at snf.stanford.edu Thu Mar 6 09:37:15 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 6, 2003 9:37:15 PM Subject: Shutdown pquest 2003-03-06 17:55:10: Report Clear for pquest Message-ID: vented chamber and adjusted height on three lifter pins and check clamping force. From ssun at snf.stanford.edu Tue Mar 25 04:18:01 2003 From: ssun at snf.stanford.edu (ssun at snf.stanford.edu) Date: Mar 25, 2003 4:18:01 PM Subject: Shutdown pquest 2003-03-25 16:18:01: Report Shutdown for pquest Message-ID: Our wafer got stuck inside the chamber right before unloading. The system is waiting for the maintenance to vent and reset. Sorry for the problem and inconvenience! Suzy and James From cbaxter at snf.stanford.edu Tue Mar 25 07:45:40 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mar 25, 2003 7:45:40 PM Subject: Shutdown pquest 2003-03-25 16:18:01: Report Clear for pquest Message-ID: removed stuck wafer and wet cleaned chamber. ran 30 mins o2 clean From pickard at snf.stanford.edu Sun Mar 30 08:18:58 2003 From: pickard at snf.stanford.edu (pickard at snf.stanford.edu) Date: Mar 30, 2003 8:18:58 AM Subject: Shutdown pquest 2003-03-30 08:18:57: Report Shutdown for pquest Message-ID: Pquest is down. My wafer holder broke inside when I was loading the wafer. The good news is that I stopped it immediately and was able to remove most of the wafer (because it had a thick coating of Al and stayed together). The bad news is that some shards of Si broke off on the O-ring, preventing further use. Also, my diamond sample fell off the wafer holder. Could you please retrieve the valuable diamond. It is about 2x3 mm and is resting directly on the o-ring on the heating/cooling stage. It is blue in color. Thank you. From pickard at snf.stanford.edu Sun Mar 30 08:23:00 2003 From: pickard at snf.stanford.edu (pickard at snf.stanford.edu) Date: Mar 30, 2003 8:23:00 AM Subject: Problem pquest 2003-03-30 08:23:00: Report Problem for pquest Message-ID: My wafer holder broke inside pquest when loading. I retrieved most of the wafer because I stopped the load once I saw the contact and it had a thick coating of Al which prevented a complete shatter. However, some shards landed on the o-ring and need to be removed before it can operate again. Also, my expensive diamond sample fell onto the heating/cooling stage, just on top of the o-ring on the far side from where the transfer arm loads. Could you please retrieve this for me. The diamond sample is blue in color and 2x3mm insize (roughly) and about 1 mm high. The sample is very important for my experiment. Thanks... From booth at snf.stanford.edu Mon Mar 31 02:12:40 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 31, 2003 2:12:40 PM Subject: Problem pquest 2003-03-30 08:23:00: Report Clear for pquest Message-ID: could not find sample. From booth at snf.stanford.edu Mon Mar 31 02:14:20 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 31, 2003 2:14:20 PM Subject: Shutdown pquest 2003-03-30 08:18:57: Report Clear for pquest Message-ID: opened etch chamber, could not find Dan's sample. Opened gate valve & cleaned up broken wafers on turbo inlet screen, wet cleaned chamber. Chamber needs to be O2cleaned/seasoned. From booth at snf.stanford.edu Mon Mar 31 02:14:42 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 31, 2003 2:14:42 PM Subject: Shutdown pquest 2003-03-31 14:14:42: Report Shutdown for pquest Message-ID: System needs process testing. From hphan at snf.stanford.edu Mon Mar 31 03:03:38 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Mar 31, 2003 3:03:38 PM Subject: Shutdown pquest 2003-03-31 14:14:42: Report Clear for pquest Message-ID: Run an O2 CLeaning and standard process. It works ok now.