From gigi at snf.stanford.edu Tue May 6 11:00:06 2003 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: May 6, 2003 11:00:06 AM Subject: Comment pquest 2003-05-06 11:00:05: backside He flux very high Message-ID: .. around 7-8 sccm. This He comes directly into the chamber, so it may affect your recipe parameters, if you are etching at very low flow of other gases.... check the etch rate From true at snf.stanford.edu Thu May 8 05:08:53 2003 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: May 8, 2003 5:08:53 PM Subject: Shutdown pquest 2003-05-08 17:08:52: wafer broke Message-ID: wafer broke on chuck, after etching, please save any sizable pieces for me. From cbaxter at snf.stanford.edu Fri May 9 10:38:44 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 9, 2003 10:38:44 PM Subject: Shutdown pquest 2003-05-08 17:08:52: Report Clear for pquest Message-ID: removed wafer and ran o2 clean From kaimeifu at snf.stanford.edu Tue May 13 09:47:27 2003 From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu) Date: May 13, 2003 9:47:27 AM Subject: Problem pquest 2003-05-13 09:47:23: no dummy wafer, MW indicator funny Message-ID: There was no dummy wafer by the PQuest. The MW indicator on the mW power supply began slowly climbing during the Oxygen.rcp until it maxed out. It stayed this way even after process was complete and through the next process. All other MW indicators read normal. From junxian at snf.stanford.edu Tue May 13 03:39:48 2003 From: junxian at snf.stanford.edu (junxian at snf.stanford.edu) Date: May 13, 2003 3:39:48 PM Subject: Problem pquest 2003-05-13 15:39:47: Report Problem for pquest Message-ID: better use single-side polished carrier wafer upside down (polished surface to LED) From booth at snf.stanford.edu Tue May 13 04:00:35 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 13, 2003 4:00:35 PM Subject: Problem pquest 2003-05-13 15:39:47: Report Clear for pquest Message-ID: The LED sensor in the LoadLock that tells the system that a wafer is present in the pocket of the load arm, is getting weak. I've optimizd the adjustment, but cannot get any more sensitivity. We need to get a new sensor. Meanwhile, if the system does not recognize your wafer on the load arm, mount your sampe on the backside of the carrier wafer, so that the polished side is facing down. From cbaxter at snf.stanford.edu Tue May 13 05:16:55 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 13, 2003 5:16:55 PM Subject: Problem pquest 2003-05-13 09:47:23: Report Clear for pquest Message-ID: reboot system and read out indicator is back to normal From mwiemer at snf.stanford.edu Thu May 15 02:10:24 2003 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: May 15, 2003 2:10:24 PM Subject: Problem pquest 2003-05-15 14:10:23: Report Problem for pquest Message-ID: The O2 (Oxygen) does not flow anymore. Len has looked at the machine and agrees that there is a problem with the O2. Given this problem, recipies with O2 will not be able to run. Other recipies may be fine however. From booth at snf.stanford.edu Fri May 16 07:04:15 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 16, 2003 7:04:15 AM Subject: Problem pquest 2003-05-15 14:10:23: Report Clear for pquest Message-ID: found stuck solenoid for final gas delivery valve I cycled it several times & it seems to be working normally again. O2 is flowing again. OK to use. From zlrao at snf.stanford.edu Fri May 16 09:43:17 2003 From: zlrao at snf.stanford.edu (zlrao at snf.stanford.edu) Date: May 16, 2003 9:43:17 AM Subject: Shutdown pquest 2003-05-16 09:43:17: Report Shutdown for pquest Message-ID: I made a stupid mistake by using the wafer with flat line on the other side. The wafer fell off one of the pins during loading. I am terribly sorry about that. From zlrao at snf.stanford.edu Fri May 16 09:45:32 2003 From: zlrao at snf.stanford.edu (zlrao at snf.stanford.edu) Date: May 16, 2003 9:45:32 AM Subject: Problem pquest 2003-05-16 09:45:31: Report Problem for pquest Message-ID: I used the wrong wafer. The wafer fell off one of the pins during loading. From booth at snf.stanford.edu Fri May 16 02:43:58 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 16, 2003 2:43:58 PM Subject: Problem pquest 2003-05-16 09:45:31: Report Clear for pquest Message-ID: this was changed to a problem report. From booth at snf.stanford.edu Fri May 16 02:45:57 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 16, 2003 2:45:57 PM Subject: Shutdown pquest 2003-05-16 09:43:17: Report Clear for pquest Message-ID: Opened chamber & removed wafer (not broken) Wafer had minor flat 180deg from major flat - so it fell off of the lift pins. Wet cleaned etch chamber & pumped down. Henry will do O2 clean , then season chamber. From booth at snf.stanford.edu Fri May 16 02:47:13 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 16, 2003 2:47:13 PM Subject: Shutdown pquest 2003-05-16 14:47:12: Report Shutdown for pquest Message-ID: Pquest is shutdown until Henry can do an o2 clean and season the chamber. From hphan at snf.stanford.edu Fri May 16 04:52:02 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 16, 2003 4:52:02 PM Subject: Shutdown pquest 2003-05-16 14:47:12: Report Clear for pquest Message-ID: Ran a O2 clean and seasoning. From kaimeifu at snf.stanford.edu Thu May 22 10:03:09 2003 From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu) Date: May 22, 2003 10:03:09 AM Subject: Problem pquest 2003-05-22 10:03:08: film on wafer Message-ID: ran my process on a dummy wafer and wafer is coated with a film. From hphan at snf.stanford.edu Fri May 23 04:00:08 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 23, 2003 4:00:08 PM Subject: Problem pquest 2003-05-22 10:03:08: Report Clear for pquest Message-ID: Try to run more seasoning. From cmfaulkn at snf.stanford.edu Thu May 29 07:44:50 2003 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: May 29, 2003 7:44:50 PM Subject: Problem pquest 2003-05-29 19:44:46: Report Problem for pquest Message-ID: Backside He flow tolerance error is aborting the program multiple times with several different wafers. From cbaxter at snf.stanford.edu Fri May 30 12:16:33 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 30, 2003 12:16:33 AM Subject: Problem pquest 2003-05-29 19:44:46: Report Clear for pquest Message-ID: adjusted clamping force