Problem pquest 2003-05-13 09:47:23: no dummy wafer, MW indicator funny

kaimeifu at snf.stanford.edu kaimeifu at snf.stanford.edu
Tue May 13 09:47:27 PDT 2003


There was no dummy wafer by the PQuest.
The MW indicator on the mW power supply began slowly climbing during the Oxygen.rcp until it maxed out.  It stayed this way even after process was complete and through the next process.  All other MW indicators read normal.




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