Shutdown pquest 2003-05-16 09:43:17: Report Clear for pquest

booth at snf.stanford.edu booth at snf.stanford.edu
Fri May 16 02:45:57 PDT 2003


Opened chamber & removed wafer (not broken)
Wafer had minor flat 180deg from major flat - so
it fell off of the lift pins.
Wet cleaned etch chamber & pumped down.
Henry will do O2 clean , then season chamber.




More information about the pquest-pcs mailing list