From hendrikb at snf.stanford.edu Sat Nov 8 13:12:27 2003 From: hendrikb at snf.stanford.edu (hendrikb at snf.stanford.edu) Date: Sat, 8 Nov 2003 13:12:27 -0800 Subject: Shutdown pquest 2003-11-08 13:12:26: Wafer broke while loading Message-ID: Reason unclear. Seemed spontaneous. From hphan at snf.stanford.edu Mon Nov 10 14:45:54 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Mon, 10 Nov 2003 14:45:54 -0800 Subject: Shutdown pquest 2003-11-08 13:12:26: Wafer broke while loading Message-ID: From mwiemer at snf.stanford.edu Fri Nov 14 14:14:20 2003 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Fri, 14 Nov 2003 14:14:20 -0800 Subject: Problem pquest 2003-11-14 14:14:20: temp issue Message-ID: The chiller is set to 20deg the heater is set to 12 deg (so it is off) yet the chuck temp reads 27deg and is not cooling down. Also, I think my process ran a bit hotter than usual (according to the chuck temp). I dont know what is going on, it just seems like something is a bit off with the chuck temp. -Mike From hphan at snf.stanford.edu Fri Nov 14 16:44:17 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Fri, 14 Nov 2003 16:44:17 -0800 Subject: Problem pquest 2003-11-14 14:14:20: temp issue Message-ID: Chuck controller manually on. Temp go down as the setting after I turned it off. From booth at snf.stanford.edu Thu Nov 20 06:22:30 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Thu, 20 Nov 2003 06:22:30 -0800 Subject: Shutdown pquest 2003-11-20 06:22:29: vane pump maint. Message-ID: From booth at snf.stanford.edu Thu Nov 20 07:31:52 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Thu, 20 Nov 2003 07:31:52 -0800 Subject: Shutdown pquest 2003-11-20 06:22:29: vane pump maint. Message-ID: turned off turbo pump to add fomblin to backing pump. From kaimeifu at snf.stanford.edu Wed Nov 26 15:52:02 2003 From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu) Date: Wed, 26 Nov 2003 15:52:02 -0800 Subject: Comment pquest 2003-11-26 15:52:01: trouble with wafer sensor Message-ID: I had trouble with the laser sensor today sensing my wafer. The trick I normally use of tripping the sensor did not work because it would trip but as soon as I pressed load, it would not sense the wafer anymore. I flipped the wafer so polished side was down and this fixed the problem. Thre reflected power was high compared to the dummy but after optimizing it for my wafer when I added my pieces I had no trouble. If anyone else is having trouble with this, I hope this helps.