From edo at snf.stanford.edu Sun Oct 19 03:21:14 2003 From: edo at snf.stanford.edu (edo at snf.stanford.edu) Date: Oct 19, 2003 3:21:14 PM Subject: Problem pquest 2003-10-19 15:21:13: Report Problem for pquest Message-ID: load lock does not vent. load arm not detected at home position. From booth at snf.stanford.edu Tue Oct 21 08:32:27 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 21, 2003 8:32:27 AM Subject: Shutdown pquest 2003-10-21 08:32:24: Report Shutdown for pquest Message-ID: Report by edo on Sun 10/19 should have been a Shutdown. From booth at snf.stanford.edu Tue Oct 21 08:33:19 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 21, 2003 8:33:19 AM Subject: Problem pquest 2003-10-19 15:21:13: Report Clear for pquest Message-ID: This Problem report has been changed to a shutdown. From cbaxter at snf.stanford.edu Wed Oct 22 10:39:12 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Oct 22, 2003 10:39:12 PM Subject: Shutdown pquest 2003-10-21 08:32:24: Report Clear for pquest Message-ID: I/o card is working again, after the hard reset From dfattal at snf.stanford.edu Thu Oct 23 13:45:22 2003 From: dfattal at snf.stanford.edu (dfattal at snf.stanford.edu) Date: Thu, 23 Oct 2003 13:45:22 -0700 Subject: Shutdown pquest 2003-10-23 13:45:22: Report Shutdown for pquest Message-ID: wafer broke inside chamber From cbaxter at snf.stanford.edu Thu Oct 23 16:53:36 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 23 Oct 2003 16:53:36 -0700 Subject: Shutdown pquest 2003-10-23 13:45:22: Report Clear for pquest Message-ID: Len cleaned the chamber. I wafer transfer and o2 plasma clean