From booth at snf.stanford.edu Tue Sep 2 06:41:42 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 2, 2003 6:41:42 AM Subject: Problem pquest 2003-08-30 13:09:37: Report Clear for pquest Message-ID: Probably problem caused by dummy wafer type or films, not allowing sensor to detect presence of wafer. From kaimeifu at snf.stanford.edu Fri Sep 26 03:55:33 2003 From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu) Date: Sep 26, 2003 3:55:33 PM Subject: Problem pquest 2003-09-26 15:55:33: high reflected MW power and loading laser sensor Message-ID: When entering in old tuning stub setting I got reflected powers o100 out of 200 or 200 out of 400. I was able to minimize the reflected power to 2 using the tuning stubs, but then when I reran the process, it jumped up again and the plasma did not ignite and I had to minimize again. I tried using a previous user's tuning stub settings (dfattal) since the recipe is similar. The ref power was good on the dummy and the plasma ignited, but then on my sample the same thing occured- reflected powers greater than 200! In the end for my etch I quickly minimized the reflected power to get a plasma, but this takes a sig. amount of a 60 s etch. Also, today the laser sensor did not sense my wafer (which I have used multiple times). I was able to eventually load the wafer (with Henry's help) by tricking the sensor with my tweezers. Once on it generally stayed on. From cbaxter at snf.stanford.edu Fri Sep 26 05:10:43 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 26, 2003 5:10:43 PM Subject: Problem pquest 2003-09-26 15:55:33: Report Clear for pquest Message-ID: was able to fine tuned microwave power using o2 plasma.