From kaimeifu at snf.stanford.edu  Sat Apr  3 22:15:21 2004
From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu)
Date: Sat, 3 Apr 2004 22:15:21 -0800
Subject: Shutdown pquest 2004-04-03 22:15:20: wafer off pin
Message-ID: <mailman.414.1357938562.25846.pquest-pcs@snf.stanford.edu>

During unload procedure wafer fell off pin. I aborted the unload with the <esc> key w/o breaking the wafer.



From cbaxter at snf.stanford.edu  Sat Apr  3 23:01:02 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sat, 3 Apr 2004 23:01:02 -0800
Subject: Shutdown pquest 2004-04-03 22:15:20: wafer off pin
Message-ID: <mailman.415.1357938562.25846.pquest-pcs@snf.stanford.edu>

wafer was not flat align right on the arm. vented chamber
and removed wafer carrier and sample. wet clean chamber
with water and ipa.



From eenriquez at snf.stanford.edu  Mon Apr 19 15:48:26 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 19 Apr 2004 15:48:26 -0700
Subject: Problem pquest 2004-04-18 19:00:20: pressure very low
Message-ID: <mailman.416.1357938562.25846.pquest-pcs@snf.stanford.edu>

Pressure controller was in local control instead of remote.



From kaimeifu at snf.stanford.edu  Wed Apr 21 11:09:26 2004
From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu)
Date: Wed, 21 Apr 2004 11:09:26 -0700
Subject: Shutdown pquest 2004-04-21 11:09:25: wafer off of pin
Message-ID: <mailman.417.1357938562.25846.pquest-pcs@snf.stanford.edu>

loaded wafer.  noticed He flow too high during process.  tried Unloading wafer and wafer fell off of one pin.  wafer is intact with two small pieces in chamber.  pressed <esc>



From cbaxter at snf.stanford.edu  Wed Apr 21 19:34:43 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 21 Apr 2004 19:34:43 -0700
Subject: Shutdown pquest 2004-04-21 11:09:25: wafer off of pin
Message-ID: <mailman.418.1357938562.25846.pquest-pcs@snf.stanford.edu>

recovered wafer from chamber and wet cleaned



From cbaxter at snf.stanford.edu  Wed Apr 21 21:45:38 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 21 Apr 2004 21:45:38 -0700
Subject: Comment pquest 2004-04-21 21:45:37: external fiber optic
Message-ID: <mailman.419.1357938562.25846.pquest-pcs@snf.stanford.edu>

To all user, I installed a external fiber optic on top of the load 
lock lid cover. The purpose of the external optic is to be able
to use any wafer and the system can detec a wafer is present
on the load lock transfer arm. 



From jimkruger at snf.stanford.edu  Sun Apr 25 14:20:13 2004
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Sun, 25 Apr 2004 14:20:13 -0700
Subject: Shutdown pquest 2004-04-25 14:20:12: Lost wafer-still in system after etch-arm came out empry
Message-ID: <mailman.420.1357938562.25846.pquest-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Mon Apr 26 15:25:28 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 26 Apr 2004 15:25:28 -0700
Subject: Shutdown pquest 2004-04-25 14:20:12: Lost wafer-still in system after etch-arm came out empry
Message-ID: <mailman.421.1357938562.25846.pquest-pcs@snf.stanford.edu>

Removed broken wafer and cleaned up the chamber.  Found the chuck o-ring had lifted off.  Looks like the wafer stuck to it.  Installed new o-ring and ran O2 conditioning.