From eenriquez at snf.stanford.edu Fri Aug 13 10:43:07 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Aug 2004 10:43:07 -0700 Subject: Comment pquest SNF 2004-08-13 10:43:07: Chiller coolant Message-ID: Changed the chiller coolant back to 50/50 DI/glycol. It was 100% glycol but most users had problems with chuck temperature control. Ran ethursh recipe for 10 minutes with no chuck temp change. With 100% glycol, the temp increased by 7 deg within 5 minutes. From zlrao at snf.stanford.edu Fri Aug 20 19:14:35 2004 From: zlrao at snf.stanford.edu (zlrao at snf.stanford.edu) Date: Fri, 20 Aug 2004 19:14:35 -0700 Subject: Problem pquest SNF 2004-08-20 19:14:34: chlorine flux much higher than setting Message-ID: Cl2 flux was set to 1.5sccm, but the actual reading was 3.7sccm. From cbaxter at snf.stanford.edu Fri Aug 20 19:31:49 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 20 Aug 2004 19:31:49 -0700 Subject: Problem pquest SNF 2004-08-20 19:14:34: chlorine flux much higher than setting Message-ID: re-cal cl2 mfc From eenriquez at snf.stanford.edu Wed Aug 25 07:03:05 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Aug 2004 07:03:05 -0700 Subject: Problem pquest SNF 2004-08-25 07:03:04: Chlorine and BCl3 bottle change Message-ID: Do not run processes that require Cl2 or BCl3. From eenriquez at snf.stanford.edu Thu Aug 26 08:25:37 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Aug 2004 08:25:37 -0700 Subject: Problem pquest SNF 2004-08-25 07:03:04: Chlorine and BCl3 bottle change Message-ID: Completed gas bottle change