From hphan at snf.stanford.edu Mon Jan 5 14:04:42 2004 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Mon, 5 Jan 2004 14:04:42 -0800 Subject: Shutdown pquest 2003-12-19 11:30:00: Holiday Shutdown Message-ID: From hphan at snf.stanford.edu Mon Jan 5 14:04:47 2004 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Mon, 5 Jan 2004 14:04:47 -0800 Subject: Comment pquest 2003-11-26 15:52:01: trouble with wafer sensor Message-ID: From cmfaulkn at snf.stanford.edu Tue Jan 27 11:45:34 2004 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Tue, 27 Jan 2004 11:45:34 -0800 Subject: Shutdown pquest 2004-01-27 11:45:14: RF power out of limits Message-ID: RF power works with dummy load, but goes out of limits when connected to the chuck. From mcvittie at snf.stanford.edu Tue Jan 27 11:47:34 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 27 Jan 2004 11:47:34 -0800 Subject: Shutdown pquest 2004-01-27 11:47:33: Rf can not match load Message-ID: It looks like there is an rf short. Test rf generator into dummy load and it looks good. I suggest the following: 1. Open chamber and check that there is no broken wafers shorting the electrode. 2. Open matching network and check for short. 3. Open end of long feedthrough pipe. Make sure there are no water leaks and check that the teflon insulators are in proper position. 4. Disassemble the check. Jim From cbaxter at snf.stanford.edu Tue Jan 27 17:52:27 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 27 Jan 2004 17:52:27 -0800 Subject: Shutdown pquest 2004-01-27 11:47:33: Rf can not match load Message-ID: run a 5 minutes recipe and manuallu tuned rf match without a problem From cbaxter at snf.stanford.edu Tue Jan 27 17:52:52 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 27 Jan 2004 17:52:52 -0800 Subject: Shutdown pquest 2004-01-27 11:45:14: RF power out of limits Message-ID: manaully tuned match