From vossough at snf.stanford.edu Fri Mar 5 17:34:41 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Fri, 5 Mar 2004 17:34:41 -0800 Subject: Shutdown pquest 2004-03-05 17:34:40: wafer broke Message-ID: From cbaxter at snf.stanford.edu Fri Mar 5 23:21:44 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 5 Mar 2004 23:21:44 -0800 Subject: Shutdown pquest 2004-03-05 17:34:40: wafer broke Message-ID: Vented chamber and cleaned up broken wafers. Found one of the lifter pin 12 o'clock was bent when wafer was loading while the pins was up. Removed pin and replaced From vossough at snf.stanford.edu Sat Mar 6 12:00:11 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Sat, 6 Mar 2004 12:00:11 -0800 Subject: Shutdown pquest 2004-03-06 12:00:10: wafer stuck Message-ID: From vossough at snf.stanford.edu Sat Mar 6 12:13:49 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Sat, 6 Mar 2004 12:13:49 -0800 Subject: Problem pquest 2004-03-06 12:13:48: Wafer arm stopped Message-ID: The teflon pins holding the wafer up were raised (in "up" position) when attempting to start a run (to clean chamber). In an earlier attempt on friday afternoon the "dummy" wafer broke when pushed off the raised pins. Aborted this time by pushing "Esc" on the key board. From cbaxter at snf.stanford.edu Mon Mar 8 22:35:02 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 8 Mar 2004 22:35:02 -0800 Subject: Problem pquest 2004-03-06 12:13:48: Wafer arm stopped Message-ID: From cbaxter at snf.stanford.edu Mon Mar 8 22:52:52 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 8 Mar 2004 22:52:52 -0800 Subject: Shutdown pquest 2004-03-06 12:00:10: wafer stuck Message-ID: User was using a wrong wafer to run clean recipe. The dummy wafer should be a bare silicon not a oxide wafer. The tool load lock wafer detect sensor can't detect a wafer present on the load arm if the backside of the wafer has a film on it. That was reason why it jammed on the lifter pins during loading into chamber. From cmfaulkn at snf.stanford.edu Tue Mar 9 18:07:32 2004 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Tue, 9 Mar 2004 18:07:32 -0800 Subject: Problem pquest 2004-03-09 18:07:31: turbo not at full speed Message-ID: Red light on turbo, running at less than full speed, chamber pressure at 94mtorr From cbaxter at snf.stanford.edu Tue Mar 9 18:20:21 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 9 Mar 2004 18:20:21 -0800 Subject: Problem pquest 2004-03-09 18:07:31: turbo not at full speed Message-ID: lower the purge n2 on load lock.. purge is high it overload the turbo From cbaxter at snf.stanford.edu Fri Mar 19 18:58:38 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 19 Mar 2004 18:58:38 -0800 Subject: Shutdown pquest 2004-03-19 18:58:37: need to install needle valve. Message-ID: From cbaxter at snf.stanford.edu Fri Mar 19 19:39:13 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 19 Mar 2004 19:39:13 -0800 Subject: Shutdown pquest 2004-03-19 18:58:37: need to install needle valve. Message-ID: purge needle valve is installed and set at 400mt at idle. From dfattal at snf.stanford.edu Sat Mar 20 14:06:50 2004 From: dfattal at snf.stanford.edu (dfattal at snf.stanford.edu) Date: Sat, 20 Mar 2004 14:06:50 -0800 Subject: Shutdown pquest 2004-03-20 14:06:49: pressure interlock - process pump on "alarm" Message-ID: When I started PQ today, I noticed that the "pressure interlock" and "process pump ready" displays were on "alarm". the loadlock would not pump. From cbaxter at snf.stanford.edu Sun Mar 21 15:44:51 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 21 Mar 2004 15:44:51 -0800 Subject: Shutdown pquest 2004-03-20 14:06:49: pressure interlock - process pump on "alarm" Message-ID: power glitch, system locked up all the valve close. reboot system and ramp turbo. From mcvittie at snf.stanford.edu Tue Mar 23 10:37:08 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 23 Mar 2004 10:37:08 -0800 Subject: Shutdown pquest 2004-03-23 10:37:05: Broke wafer in tool Message-ID: From mcvittie at snf.stanford.edu Tue Mar 23 10:39:06 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 23 Mar 2004 10:39:06 -0800 Subject: Problem pquest 2004-03-23 10:39:03: Bulbs Need Replacing in uw supply Message-ID: Several bulbs appear to be out on front panel. jim From cbaxter at snf.stanford.edu Tue Mar 23 17:01:18 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 23 Mar 2004 17:01:18 -0800 Subject: Problem pquest 2004-03-23 10:39:03: Bulbs Need Replacing in uw supply Message-ID: From cbaxter at snf.stanford.edu Tue Mar 23 17:02:14 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 23 Mar 2004 17:02:14 -0800 Subject: Shutdown pquest 2004-03-23 10:37:05: Broke wafer in tool Message-ID: vented chamber and vacuum broken wafer chips. wiped down chamber with water and ipa. From vossough at snf.stanford.edu Sat Mar 27 13:21:48 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Sat, 27 Mar 2004 13:21:48 -0800 Subject: Shutdown pquest 2004-03-27 13:21:48: Front panel alarms Message-ID: pressure interlock and process pump ready are on alarm turbo is down. From eenriquez at snf.stanford.edu Tue Mar 30 15:29:55 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 30 Mar 2004 15:29:55 -0800 Subject: Shutdown pquest 2004-03-27 13:21:48: Front panel alarms Message-ID: Ray found the vacuum pump switch is bad. Jumpered it and ordered replacement. Turned the turbo on and pumped down the chamber. From cbaxter at snf.stanford.edu Wed Mar 31 17:59:06 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 31 Mar 2004 17:59:06 -0800 Subject: Comment pquest 2004-03-31 17:59:05: purge Message-ID: set vent pressure @25psi. set foreline pressure @125mt. set load lock purge @400mt at idle. load lock vent time 30 to 40 sec.