From dfattal at snf.stanford.edu Sun Nov 7 15:11:20 2004 From: dfattal at snf.stanford.edu (dfattal at snf.stanford.edu) Date: Sun, 7 Nov 2004 15:11:20 -0800 Subject: Shutdown pquest SNF 2004-11-07 15:11:19: Vacuum problem Message-ID: when I got in, the "Process pump ready" and the "Pressure interlock" displays were red on "alarm". When I try to reset the system, the loadlock would not be pumped. From eenriquez at snf.stanford.edu Mon Nov 8 09:59:41 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Nov 2004 09:59:41 -0800 Subject: Shutdown pquest SNF 2004-11-07 15:11:19: Vacuum problem Message-ID: Reset the vacuum pump and turbo. From eenriquez at snf.stanford.edu Tue Nov 9 10:13:58 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Nov 2004 10:13:58 -0800 Subject: Comment pquest SNF 2004-11-09 10:13:57: Zeroed chamber pressure manometer Message-ID: Zeroed chamber manometer (0 - 0.1 Torr). It was showing -13.5 mT. From vossough at snf.stanford.edu Wed Nov 10 17:33:31 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Wed, 10 Nov 2004 17:33:31 -0800 Subject: Shutdown pquest SNF 2004-11-10 17:33:30: turbo stopped Message-ID: may be related to power glitch From cbaxter at snf.stanford.edu Fri Nov 12 00:11:27 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 12 Nov 2004 00:11:27 -0800 Subject: Shutdown pquest SNF 2004-11-10 17:33:30: turbo stopped Message-ID: Eric and I removed turbo and found impeller not spinning freelyspan impeller by hand till impellere spin freely just by tipping it side to side. Also, removed alots of broken wafer chips from inlet turbo screen. Ramped up turbo to 600hz. From ssun at snf.stanford.edu Mon Nov 15 09:15:39 2004 From: ssun at snf.stanford.edu (ssun at snf.stanford.edu) Date: Mon, 15 Nov 2004 09:15:39 -0800 Subject: Problem pquest SNF 2004-11-15 09:15:39: Turbopump failed, E006 Message-ID: From eenriquez at snf.stanford.edu Mon Nov 15 11:16:28 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Nov 2004 11:16:28 -0800 Subject: Problem pquest SNF 2004-11-15 09:15:39: Turbopump failed, E006 Message-ID: Restarted the turbo From gigi at snf.stanford.edu Tue Nov 16 16:49:24 2004 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Tue, 16 Nov 2004 16:49:24 -0800 Subject: Shutdown pquest SNF 2004-11-16 16:49:22: gate valve leaking Message-ID: it seems that the gate valve is leaking. when venting the foreline pressure goes up to 700 mTorr, and if loadlock is left vented, the turbo pump will eventually fail. Jim McVittie looked at it and confirmed From cbaxter at snf.stanford.edu Tue Nov 16 21:56:02 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 16 Nov 2004 21:56:02 -0800 Subject: Shutdown pquest SNF 2004-11-16 16:49:22: gate valve leaking Message-ID: found broken wafer chips on vat gate valve. cleaned vat valve sealing surface and gate door. pump down main chamber and left load lock at atm and monitor chamber foreline pressure for 2hrs, did not see a pressure rise on foreline. also, turbo pump speed maintained at 598hz. with load lock at atm. From jliu at snf.stanford.edu Sat Nov 20 21:15:54 2004 From: jliu at snf.stanford.edu (jliu at snf.stanford.edu) Date: Sat, 20 Nov 2004 21:15:54 -0800 Subject: Problem pquest SNF 2004-11-20 21:15:54: O-Ring on the wafer chuck may need to replace, helium flow rate is too high Message-ID: The helium flow rate has been increasing recently. Today it reaches 25.5 sccm. Wafer can't get sufficient cooling. Regards, /James From jimkruger at snf.stanford.edu Sun Nov 21 18:47:31 2004 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 21 Nov 2004 18:47:31 -0800 Subject: Comment pquest SNF 2004-11-21 18:47:31: He flow Message-ID: He backside flow "seemed" back to normal at about 6 sccm for 10 Torr, but I tried with no wafer in place and get only about 8 sccm so I think something is still wrong. What is the expected flow for no wafer? From cbaxter at snf.stanford.edu Mon Nov 22 18:06:47 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 22 Nov 2004 18:06:47 -0800 Subject: Shutdown pquest SNF 2004-11-22 18:06:46: changing he lip seal Message-ID: From cbaxter at snf.stanford.edu Mon Nov 22 19:38:58 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 22 Nov 2004 19:38:58 -0800 Subject: Shutdown pquest SNF 2004-11-22 18:06:46: changing he lip seal Message-ID: changed he lip seal back to original oring compound ( silicon) and wet cleaned chamber. backside leak is @5.3 sccm with 10torr he flowing. From cbaxter at snf.stanford.edu Mon Nov 22 19:39:08 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 22 Nov 2004 19:39:08 -0800 Subject: Comment pquest SNF 2004-11-21 18:47:31: He flow Message-ID: From cbaxter at snf.stanford.edu Mon Nov 22 19:39:20 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 22 Nov 2004 19:39:20 -0800 Subject: Problem pquest SNF 2004-11-20 21:15:54: O-Ring on the wafer chuck may need to replace, helium flow rate is too high Message-ID: From cmfaulkn at snf.stanford.edu Mon Nov 22 23:24:09 2004 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Mon, 22 Nov 2004 23:24:09 -0800 Subject: Shutdown pquest SNF 2004-11-22 23:24:09: chuck oring not seated Message-ID: During seasoning, the RF bias was ~20% low. After ~60minutes of O2 clean and seasoning, removed dummy wafer, smelled buring rubber, checked chuck and noticed oring was lifted out of place. Nothing unusual about gas flows or pressure. From eenriquez at snf.stanford.edu Tue Nov 23 15:01:13 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Nov 2004 15:01:13 -0800 Subject: Shutdown pquest SNF 2004-11-22 23:24:09: chuck oring not seated Message-ID: Vented chamber and installed a new silicone o-ring. Zeroed the backside He flowmeter. Also installed additional aluminum foil around the backside He flometer and manometer to shield it from RF noise. Now He flow without a wafer is ~ 8 mT, with wafer = ~2.2 mT. Ran several recipes with different power settings with no problems. From jimkruger at snf.stanford.edu Wed Nov 24 10:29:33 2004 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 24 Nov 2004 10:29:33 -0800 Subject: Problem pquest SNF 2004-11-24 10:29:32: EMO recovery? Message-ID: I was running "no wafer" He tests. I let the recipe end so it started to "unload" with a wafer on the arm so I hit the "Emergency off". How do I restart? From jimkruger at snf.stanford.edu Wed Nov 24 10:46:18 2004 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 24 Nov 2004 10:46:18 -0800 Subject: Comment pquest SNF 2004-11-24 10:46:18: I found the EMO reset--back on line Message-ID: From jimkruger at snf.stanford.edu Wed Nov 24 11:44:45 2004 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 24 Nov 2004 11:44:45 -0800 Subject: Shutdown pquest SNF 2004-11-24 11:44:45: Turbo crash? Message-ID: While Elmer was helping me recover from my EMO incident, the turbo seemed to be spinning up normally, but then crashed. From cbaxter at snf.stanford.edu Tue Nov 30 16:01:44 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 30 Nov 2004 16:01:44 -0800 Subject: Comment pquest SNF 2004-11-30 16:01:43: pump is been removed for repair. Message-ID: