Shutdown pquest SNF 2004-11-16 16:49:22: gate valve leaking

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Nov 16 21:56:02 PST 2004


found broken wafer chips on vat gate valve. cleaned
vat valve sealing surface and gate door. pump down main
chamber and left  load lock at atm and monitor chamber
foreline pressure for 2hrs, did not see  a pressure rise
on foreline. also, turbo pump speed maintained at 598hz.
with load lock at atm.




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