Problem pquest SNF 2004-11-20 21:15:54: O-Ring on the wafer chuck may need to replace, helium flow rate is too high

jliu at jliu at
Sat Nov 20 21:15:54 PST 2004

The helium flow rate has been increasing recently. Today it 
reaches 25.5 sccm. Wafer can't get sufficient cooling.

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