Problem pquest SNF 2004-11-20 21:15:54: O-Ring on the wafer chuck may need to replace, helium flow rate is too high

jliu at snf.stanford.edu jliu at snf.stanford.edu
Sat Nov 20 21:15:54 PST 2004


The helium flow rate has been increasing recently. Today it 
reaches 25.5 sccm. Wafer can't get sufficient cooling.
Regards,
/James 




More information about the pquest-pcs mailing list