Comment pquest SNF 2004-11-21 18:47:31: He flow

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Sun Nov 21 18:47:31 PST 2004


He backside flow "seemed" back to normal at about 6 sccm for 10 Torr, but I tried with no wafer in place and get only about 8 sccm so I think something is still wrong.  What is the expected flow for no wafer?




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