Shutdown pquest SNF 2004-11-22 23:24:09: chuck oring not seated

cmfaulkn at cmfaulkn at
Mon Nov 22 23:24:09 PST 2004

During seasoning, the RF bias was ~20% low.  After ~60minutes of O2 clean and seasoning, removed dummy wafer, smelled buring rubber, checked chuck and noticed oring was lifted out of place.  Nothing unusual about gas flows or pressure.

More information about the pquest-pcs mailing list