Shutdown pquest SNF 2004-11-22 23:24:09: chuck oring not seated

cmfaulkn at snf.stanford.edu cmfaulkn at snf.stanford.edu
Mon Nov 22 23:24:09 PST 2004


During seasoning, the RF bias was ~20% low.  After ~60minutes of O2 clean and seasoning, removed dummy wafer, smelled buring rubber, checked chuck and noticed oring was lifted out of place.  Nothing unusual about gas flows or pressure.




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