Problem pquest SNF 2004-11-24 10:29:32: EMO recovery?

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Wed Nov 24 10:29:33 PST 2004


I was running "no wafer" He tests. I let the recipe end so it started to "unload" with a wafer on the arm so I hit the "Emergency off".  How do I restart?




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