From gigi at snf.stanford.edu  Thu Oct 21 13:26:25 2004
From: gigi at snf.stanford.edu (gigi at snf.stanford.edu)
Date: Thu, 21 Oct 2004 13:26:25 -0700
Subject: Problem pquest SNF 2004-10-21 13:26:24: software crash
Message-ID: <mailman.455.1357938562.25846.pquest-pcs@snf.stanford.edu>

Software is stuck on "run recipe window". Cannot get back to main window. Probably need to restart computer.



From eenriquez at snf.stanford.edu  Thu Oct 21 15:12:25 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 21 Oct 2004 15:12:25 -0700
Subject: Problem pquest SNF 2004-10-21 13:26:24: software crash
Message-ID: <mailman.456.1357938562.25846.pquest-pcs@snf.stanford.edu>

Restarted the ecr program



From altug at snf.stanford.edu  Sat Oct 23 23:56:48 2004
From: altug at snf.stanford.edu (altug at snf.stanford.edu)
Date: Sat, 23 Oct 2004 23:56:48 -0700
Subject: Problem pquest SNF 2004-10-23 23:56:48: lost wafer in the system
Message-ID: <mailman.457.1357938562.25846.pquest-pcs@snf.stanford.edu>

it shows "waiting for th clamp down sensor" 



From eenriquez at snf.stanford.edu  Mon Oct 25 10:17:58 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 25 Oct 2004 10:17:58 -0700
Subject: Problem pquest SNF 2004-10-23 23:56:48: lost wafer in the system
Message-ID: <mailman.458.1357938562.25846.pquest-pcs@snf.stanford.edu>

Unloaded wafer from the process chamber.  Cycled wafers using clean 1 recipe.