From eenriquez at snf.stanford.edu Wed Sep 1 07:48:03 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Sep 2004 07:48:03 -0700 Subject: Comment pquest SNF 2004-09-01 07:48:02: Chlorine pressure Message-ID: Mike D. found the Cl2 regulator had been turned down to 0 psi.Asked him to adjust back to 10 psi. Cl2 MFC minimum flow currently is 1.4 sccm. From eenriquez at snf.stanford.edu Fri Sep 10 15:10:17 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Sep 2004 15:10:17 -0700 Subject: Comment pquest SNF 2004-09-01 07:48:02: Chlorine pressure Message-ID: OK From eenriquez at snf.stanford.edu Fri Sep 10 15:10:27 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Sep 2004 15:10:27 -0700 Subject: Comment pquest SNF 2004-08-13 10:43:07: Chiller coolant Message-ID: OK From eenriquez at snf.stanford.edu Fri Sep 10 15:10:39 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Sep 2004 15:10:39 -0700 Subject: Comment pquest SNF 2004-07-29 10:12:17: Zeroed pressure reading Message-ID: OK From eenriquez at snf.stanford.edu Fri Sep 10 15:13:21 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Sep 2004 15:13:21 -0700 Subject: Comment pquest SNF 2004-09-10 15:13:20: Changed MFC analog offsets Message-ID: Changed the analog offsets of all the MFCs so that the actual flow will more closely match the setpoint. All the offsets were adjusted with the MFCs set at 10 sccm flow. From jimkruger at snf.stanford.edu Tue Sep 14 16:59:11 2004 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 14 Sep 2004 16:59:11 -0700 Subject: Problem pquest SNF 2004-09-14 16:59:10: recipe editor Message-ID: recipe edit stopped working. I think the systme needs a hard reset. From jimkruger at snf.stanford.edu Tue Sep 14 18:22:01 2004 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 14 Sep 2004 18:22:01 -0700 Subject: Comment pquest SNF 2004-09-14 18:21:59: re-boot worked Message-ID: re-boot of the computer fixed the "can't edit recipes" problem but I can't clear the comment.. From cbaxter at snf.stanford.edu Tue Sep 14 19:40:35 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 14 Sep 2004 19:40:35 -0700 Subject: Comment pquest SNF 2004-09-14 18:21:59: re-boot worked Message-ID: From cbaxter at snf.stanford.edu Tue Sep 14 19:41:10 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 14 Sep 2004 19:41:10 -0700 Subject: Problem pquest SNF 2004-09-14 16:59:10: recipe editor Message-ID: verified recipe and checked. From eenriquez at snf.stanford.edu Thu Sep 23 14:50:53 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Sep 2004 14:50:53 -0700 Subject: Comment pquest SNF 2004-09-23 14:50:53: New o-ring material for backside He cooling Message-ID: Replaced the backside He cooling silicone o-ring with Kalrez as per Jim Mcvitte. Cycled wafers and ran processes with no problems. From jimkruger at snf.stanford.edu Tue Sep 28 13:45:03 2004 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 28 Sep 2004 13:45:03 -0700 Subject: Shutdown pquest SNF 2004-09-28 13:45:02: Turbo failed- red light on Message-ID: From jimkruger at snf.stanford.edu Tue Sep 28 13:45:48 2004 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 28 Sep 2004 13:45:48 -0700 Subject: Problem pquest SNF 2004-09-28 13:45:47: turbo failed- rede light on Message-ID: From jimkruger at snf.stanford.edu Tue Sep 28 13:46:50 2004 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 28 Sep 2004 13:46:50 -0700 Subject: Problem pquest SNF 2004-09-28 13:46:49: turbo failed - red light on Message-ID: turbo failed From jimkruger at snf.stanford.edu Tue Sep 28 13:48:13 2004 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 28 Sep 2004 13:48:13 -0700 Subject: Comment pquest SNF 2004-09-28 13:48:12: turbo failed Message-ID: turbo failed, problem report not registering. From eenriquez at snf.stanford.edu Tue Sep 28 13:58:26 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Sep 2004 13:58:26 -0700 Subject: Comment pquest SNF 2004-09-28 13:48:12: turbo failed Message-ID: From eenriquez at snf.stanford.edu Tue Sep 28 13:59:07 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Sep 2004 13:59:07 -0700 Subject: Problem pquest SNF 2004-09-28 13:46:49: turbo failed - red light on Message-ID: user entered same problem several times From eenriquez at snf.stanford.edu Tue Sep 28 13:59:30 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Sep 2004 13:59:30 -0700 Subject: Problem pquest SNF 2004-09-28 13:45:47: turbo failed- rede light on Message-ID: user entered the same problem several times From eenriquez at snf.stanford.edu Tue Sep 28 15:18:24 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Sep 2004 15:18:24 -0700 Subject: Shutdown pquest SNF 2004-09-28 13:45:02: Turbo failed- red light on Message-ID: Restarted turbo. From eenriquez at snf.stanford.edu Tue Sep 28 15:20:38 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Sep 2004 15:20:38 -0700 Subject: Comment pquest SNF 2004-09-28 15:20:37: Zeroed all MFCs Message-ID: Zeroed all MFCs and adjusted analog offset to match the setpoint readings with the flows. From jimkruger at snf.stanford.edu Tue Sep 28 18:04:11 2004 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 28 Sep 2004 18:04:11 -0700 Subject: Problem pquest SNF 2004-09-28 18:04:04: lost wafer in system Message-ID: From jimkruger at snf.stanford.edu Tue Sep 28 18:04:37 2004 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 28 Sep 2004 18:04:37 -0700 Subject: Shutdown pquest SNF 2004-09-28 18:04:36: lost wafer in system Message-ID: From cbaxter at snf.stanford.edu Tue Sep 28 22:24:50 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 28 Sep 2004 22:24:50 -0700 Subject: Shutdown pquest SNF 2004-09-28 18:04:36: lost wafer in system Message-ID: recovered stuck wafer inside the chamber. From cbaxter at snf.stanford.edu Tue Sep 28 22:25:21 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 28 Sep 2004 22:25:21 -0700 Subject: Problem pquest SNF 2004-09-28 18:04:04: lost wafer in system Message-ID: recovered wafer.