Comment pquest SNF 2004-09-23 14:50:53: New o-ring material for backside He cooling

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Sep 23 14:50:53 PDT 2004


Replaced the backside He cooling silicone o-ring with Kalrez as per Jim Mcvitte.  Cycled wafers and ran processes with no problems. 




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