From eenriquez at snf.stanford.edu  Tue Feb  1 07:44:29 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 1 Feb 2005 07:44:29 -0800
Subject: Problem pquest SNF 2005-02-01 07:44:29: SF6 bottle change
Message-ID: <mailman.493.1357938562.25846.pquest-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Tue Feb  1 09:21:09 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 1 Feb 2005 09:21:09 -0800
Subject: Problem pquest SNF 2005-02-01 07:44:29: SF6 bottle change
Message-ID: <mailman.494.1357938562.25846.pquest-pcs@snf.stanford.edu>

completed sf6 bottle change



From jimkruger at snf.stanford.edu  Tue Feb  1 15:45:18 2005
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Tue, 1 Feb 2005 15:45:18 -0800
Subject: Comment pquest SNF 2005-02-01 15:45:17: coolant low-pumping bubbles
Message-ID: <mailman.495.1357938562.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Tue Feb  1 17:18:24 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 1 Feb 2005 17:18:24 -0800
Subject: Comment pquest SNF 2005-02-01 15:45:17: coolant low-pumping bubbles
Message-ID: <mailman.496.1357938562.25846.pquest-pcs@snf.stanford.edu>

top off chiller with glycol and water



From cbaxter at snf.stanford.edu  Tue Feb  1 17:18:34 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 1 Feb 2005 17:18:34 -0800
Subject: Comment pquest SNF 2005-01-18 18:12:39: Changed backside He o-ring to 8575 Kalrez o-ring
Message-ID: <mailman.497.1357938562.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Tue Feb  1 17:18:46 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 1 Feb 2005 17:18:46 -0800
Subject: Comment pquest SNF 2005-01-17 13:02:31: Turbo pump was down
Message-ID: <mailman.498.1357938562.25846.pquest-pcs@snf.stanford.edu>




From mwiemer at snf.stanford.edu  Thu Feb  3 09:56:38 2005
From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu)
Date: Thu, 3 Feb 2005 09:56:38 -0800
Subject: Shutdown pquest SNF 2005-02-03 09:56:31: 
Message-ID: <mailman.499.1357938562.25846.pquest-pcs@snf.stanford.edu>




From mwiemer at snf.stanford.edu  Thu Feb  3 09:56:54 2005
From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu)
Date: Thu, 3 Feb 2005 09:56:54 -0800
Subject: Shutdown pquest SNF 2005-02-03 09:56:49: turbo problem
Message-ID: <mailman.500.1357938562.25846.pquest-pcs@snf.stanford.edu>

I loaded a dummy, seasoned the chamber, then pressed "unload". The turbo made a loud noise and then sounded like it was spinning down. I cannot unload the dummy from the chuck. The lights on the turbo controller now say that it is levatating and accelerating, but I still cannot unload the dummy wafer.



From eenriquez at snf.stanford.edu  Thu Feb  3 11:26:06 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 3 Feb 2005 11:26:06 -0800
Subject: Shutdown pquest SNF 2005-02-03 09:56:49: turbo problem
Message-ID: <mailman.501.1357938563.25846.pquest-pcs@snf.stanford.edu>

mechanical pumps went off.  Turned them back on and recovered the turbo.



From eenriquez at snf.stanford.edu  Thu Feb  3 11:26:44 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 3 Feb 2005 11:26:44 -0800
Subject: Shutdown pquest SNF 2005-02-03 09:56:31: 
Message-ID: <mailman.502.1357938563.25846.pquest-pcs@snf.stanford.edu>

recovered the turbo after mech pumps shutdown.