Shutdown pquest SNF 2005-02-03 09:56:49: turbo problem

mwiemer at snf.stanford.edu mwiemer at snf.stanford.edu
Thu Feb 3 09:56:54 PST 2005


I loaded a dummy, seasoned the chamber, then pressed "unload". The turbo made a loud noise and then sounded like it was spinning down. I cannot unload the dummy from the chuck. The lights on the turbo controller now say that it is levatating and accelerating, but I still cannot unload the dummy wafer.




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