From eenriquez at snf.stanford.edu Mon Jan 3 14:54:21 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Jan 2005 14:54:21 -0800 Subject: Comment pquest SNF 2005-01-03 14:54:20: Chlorine zero flow Message-ID: Re-zeroed the Cl2 MFC. Minimum flow now is 0.6 sccm From raldaz at snf.stanford.edu Mon Jan 17 13:02:32 2005 From: raldaz at snf.stanford.edu (raldaz at snf.stanford.edu) Date: Mon, 17 Jan 2005 13:02:32 -0800 Subject: Comment pquest SNF 2005-01-17 13:02:31: Turbo pump was down Message-ID: The turbo pump was down when I started using the tool today. The pump started normally after which I seasoned the chamber with my chlorine recipe for 1h. My etch seems to be going OKso far. The pump's battery check light is on, so that could have something to do with the pump being down. Elmer and Cesar, could you check that??? From cbaxter at snf.stanford.edu Tue Jan 18 18:12:39 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 18 Jan 2005 18:12:39 -0800 Subject: Comment pquest SNF 2005-01-18 18:12:39: Changed backside He o-ring to 8575 Kalrez o-ring Message-ID: From kenney at snf.stanford.edu Tue Jan 25 16:08:40 2005 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Tue, 25 Jan 2005 16:08:40 -0800 Subject: Problem pquest SNF 2005-01-25 16:08:38: Turbopump? Message-ID: It sounded like the turbopump was spinning, down, down, down, ... From cbaxter at snf.stanford.edu Tue Jan 25 18:17:52 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 25 Jan 2005 18:17:52 -0800 Subject: Problem pquest SNF 2005-01-25 16:08:38: Turbopump? Message-ID: found both main and lock lock pump off.. restart pump and ramp up turbo up to speed.