Comment pquest SNF 2005-01-03 14:54:20: Chlorine zero flow
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Jan 3 14:54:21 PST 2005
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Comment pquest SNF 2005-01-17 13:02:31: Turbo pump was down
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Re-zeroed the Cl2 MFC. Minimum flow now is 0.6 sccm
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Comment pquest SNF 2005-01-17 13:02:31: Turbo pump was down
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