Comment pquest SNF 2005-01-17 13:02:31: Turbo pump was down

raldaz at snf.stanford.edu raldaz at snf.stanford.edu
Mon Jan 17 13:02:32 PST 2005


The turbo pump was down when I started using the tool today.  The pump started normally after which I seasoned the chamber with my chlorine recipe for 1h.  My etch seems to be going OKso far.  The pump's battery check light is on, so that could have something to do with the pump being down.  Elmer and Cesar, could you check that???




More information about the pquest-pcs mailing list