Problem pquest SNF 2005-07-06 12:07:47: forward RF at 1999

ifushman at ifushman at
Wed Jul 6 12:07:47 PDT 2005

the forward RF kept going up after my etch for some reason. It is at 1999 and won't turn on the plasma any more. I ran the davegaas recipe for 20 min + 180 sec.

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