Problem pquest SNF 2005-07-06 12:07:47: forward RF at 1999

ifushman at snf.stanford.edu ifushman at snf.stanford.edu
Wed Jul 6 12:07:47 PDT 2005


the forward RF kept going up after my etch for some reason. It is at 1999 and won't turn on the plasma any more. I ran the davegaas recipe for 20 min + 180 sec.
-ilya




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