From dfattal at snf.stanford.edu Thu Jun 2 11:42:35 2005 From: dfattal at snf.stanford.edu (dfattal at snf.stanford.edu) Date: Thu, 2 Jun 2005 11:42:35 -0700 Subject: Problem pquest SNF 2005-06-02 11:42:32: chambers needs cleaning ? Message-ID: I did some O2 etch and the plasma looked red, which is very unusual. Something might be wrong, and i will postponed my etch. From mcvittie at snf.stanford.edu Thu Jun 2 13:15:00 2005 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Thu, 02 Jun 2005 13:15:00 -0700 Subject: Problem pquest SNF 2005-06-02 11:42:32: chambers needs cleaning ? Message-ID: <429F68C4.AB149ECF@snf.stanford.edu> A pink plasma would signify an air leak. Jim -------------- next part -------------- A non-text attachment was scrubbed... Name: mcvittie.vcf Type: text/x-vcard Size: 422 bytes Desc: Card for Jim McVittie URL: From eenriquez at snf.stanford.edu Thu Jun 2 13:51:39 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Jun 2005 13:51:39 -0700 Subject: Problem pquest SNF 2005-06-02 11:42:32: chambers needs cleaning ? Message-ID: Found the turbo pump was off. Turn the turbo back on and ran an O2 plasma for 10 minutes. Plasma color looks normal (greenish-blue). From goetzi at snf.stanford.edu Mon Jun 6 10:07:19 2005 From: goetzi at snf.stanford.edu (goetzi at snf.stanford.edu) Date: Mon, 6 Jun 2005 10:07:19 -0700 Subject: Shutdown pquest SNF 2005-06-06 10:07:19: Pquest shutdown Message-ID: Some indicators do not work proper and waver got crashed inside the chamber From eenriquez at snf.stanford.edu Mon Jun 6 12:39:26 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Jun 2005 12:39:26 -0700 Subject: Shutdown pquest SNF 2005-06-06 10:07:19: Pquest shutdown Message-ID: Cleaned chamber and loadlock. Cycled wafers and ran a 10 minute O2 plasma. From jimkruger at snf.stanford.edu Mon Jun 13 16:58:53 2005 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 13 Jun 2005 16:58:53 -0700 Subject: Problem pquest SNF 2005-06-13 16:58:52: upper microwave fwd power display bad Message-ID: The upper fwd uWave power readout stopped working, but the one down on the bottom of the rack still indicates the expected values so we continue using the system. From cbaxter at snf.stanford.edu Mon Jun 13 19:02:11 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 13 Jun 2005 19:02:11 -0700 Subject: Problem pquest SNF 2005-06-13 16:58:52: upper microwave fwd power display bad Message-ID: reset controller