Problem pquest SNF 2005-06-02 11:42:32: chambers needs cleaning ?
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Jun 2 13:51:39 PDT 2005
Found the turbo pump was off. Turn the turbo back on and ran an O2 plasma for 10 minutes. Plasma color looks normal (greenish-blue).
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