Shutdown pquest SNF 2005-06-06 10:07:19: Pquest shutdown

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jun 6 12:39:26 PDT 2005

Previous message: Shutdown pquest SNF 2005-06-06 10:07:19: Pquest shutdown
Next message: Problem pquest SNF 2005-06-13 16:58:52: upper microwave fwd power display bad
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Cleaned chamber and loadlock.  Cycled wafers and ran a 10 minute O2 plasma.

Previous message: Shutdown pquest SNF 2005-06-06 10:07:19: Pquest shutdown
Next message: Problem pquest SNF 2005-06-13 16:58:52: upper microwave fwd power display bad
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the pquest-pcs mailing list