From eenriquez at snf.stanford.edu Tue Mar 1 13:12:22 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Mar 2005 13:12:22 -0800 Subject: Shutdown pquest SNF 2005-03-01 13:12:21: High etch rate Message-ID: It has a high leak rate. About 28mT/min. From cbaxter at snf.stanford.edu Tue Mar 1 23:42:48 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 1 Mar 2005 23:42:48 -0800 Subject: Shutdown pquest SNF 2005-03-01 13:12:21: High etch rate Message-ID: changed gas flex line. pump down chamber for 30mins and checked chamber l/r manually. @10mins l/r is 1.5mt per min. it should get better with longer pump down. From jimkruger at snf.stanford.edu Tue Mar 15 16:01:14 2005 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 15 Mar 2005 16:01:14 -0800 Subject: Shutdown pquest SNF 2005-03-15 16:01:13: Turbo off Message-ID: I walked by and noticed the pressure was high. I Went out of Idle, pressure dropped, foreline normal, so I tried to re-zero pressure before I noticed Turbo was off. Needs Turbo re-start and pressure re-zero. From cbaxter at snf.stanford.edu Tue Mar 15 16:28:59 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 Mar 2005 16:28:59 -0800 Subject: Shutdown pquest SNF 2005-03-15 16:01:13: Turbo off Message-ID: reset tubbo and ramped up to speed From gigi at snf.stanford.edu Wed Mar 16 23:16:05 2005 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Wed, 16 Mar 2005 23:16:05 -0800 Subject: Problem pquest SNF 2005-03-16 23:16:00: found a leak Message-ID: I run the leak-check and the pressure rose up to 3 mTorr in 1 minute (usually 1 mTorr). Also the ECR power at some point dropped to 2/3 of the requested value, also a symptom of a leak. From gigi at snf.stanford.edu Thu Mar 17 00:19:37 2005 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Thu, 17 Mar 2005 00:19:37 -0800 Subject: Comment pquest SNF 2005-03-17 00:19:36: IGNORE PREVIOUS PROBLEM Message-ID: Sorry, I unloaded and loaded my wafer again and the leak disappeared, maybe it had to do with my wafer... I'll keep an eye on it... From gigi at snf.stanford.edu Thu Mar 17 00:20:34 2005 From: gigi at snf.stanford.edu (gigi at snf.stanford.edu) Date: Thu, 17 Mar 2005 00:20:34 -0800 Subject: Comment pquest SNF 2005-03-17 00:20:34: IGNORE LEAK PROBLEM Message-ID: I unloaded and loaded wafer and problem disappeared... weird, maybe had to do with my wafer, not with machine... From eenriquez at snf.stanford.edu Thu Mar 17 08:22:37 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Mar 2005 08:22:37 -0800 Subject: Comment pquest SNF 2005-03-17 00:20:34: IGNORE LEAK PROBLEM Message-ID: Verified leak rate was ok. It was about 1.2 mT/min From eenriquez at snf.stanford.edu Thu Mar 17 08:23:21 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Mar 2005 08:23:21 -0800 Subject: Comment pquest SNF 2005-03-17 00:19:36: IGNORE PREVIOUS PROBLEM Message-ID: Verified leak rate was ok. It was about 1.2 mT/min From eenriquez at snf.stanford.edu Thu Mar 17 08:23:38 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Mar 2005 08:23:38 -0800 Subject: Problem pquest SNF 2005-03-16 23:16:00: found a leak Message-ID: Verified leak rate was ok. It was about 1.2 mT/min