Shutdown pquest SNF 2005-03-01 13:12:21: High etch rate

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Mar 1 23:42:48 PST 2005


changed gas flex line. pump down chamber for 30mins
and checked chamber l/r manually. @10mins l/r is 1.5mt per
min. it should get better with longer pump down.




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