From cmfaulkn at snf.stanford.edu Tue Nov 1 14:43:33 2005 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Tue, 1 Nov 2005 14:43:33 -0800 Subject: Problem pquest SNF 2005-11-01 14:43:32: found turbo off Message-ID: Restarted turbo. From eenriquez at snf.stanford.edu Tue Nov 1 15:57:23 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Nov 2005 15:57:23 -0800 Subject: Problem pquest SNF 2005-11-01 14:43:32: found turbo off Message-ID: Restarted the turbo pump. Was probably shut-off by powerline noise since the amtetcher turbo also went off. From patlu at snf.stanford.edu Wed Nov 2 00:44:52 2005 From: patlu at snf.stanford.edu (patlu at snf.stanford.edu) Date: Wed, 2 Nov 2005 00:44:52 -0800 Subject: Problem pquest SNF 2005-11-02 00:44:51: broke wafer inside (oops!) Message-ID: Stupid mistake on my part: the wafer was sitting on the wafer holder in the load chamber, and I told it to unload. When the arm carried the wafer into the chamber, not surprisingly the wafer broke. Some of my wafer is still on the chuck. Sorry for the inconvenience! From eenriquez at snf.stanford.edu Wed Nov 2 14:17:26 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Nov 2005 14:17:26 -0800 Subject: Problem pquest SNF 2005-11-02 00:44:51: broke wafer inside (oops!) Message-ID: Remove broken wafer pieces and wet cleaned the chamber. Ran O2 clean recipe and cycled wafers. From cmfaulkn at snf.stanford.edu Sun Nov 6 19:10:49 2005 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Sun, 6 Nov 2005 19:10:49 -0800 Subject: Problem pquest SNF 2005-11-06 19:10:49: turbo off Message-ID: I noticed the turbo is off and the "failure" light is lit. Chamber appears to be sitting at ~100mTorr. From eenriquez at snf.stanford.edu Mon Nov 7 10:14:20 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Nov 2005 10:14:20 -0800 Subject: Problem pquest SNF 2005-11-06 19:10:49: turbo off Message-ID: The mechanical pump shut-off. Re-started mech pump and turbo. Ran an O2 plasma recipe. From johnchoi at snf.stanford.edu Tue Nov 8 19:55:46 2005 From: johnchoi at snf.stanford.edu (johnchoi at snf.stanford.edu) Date: Tue, 8 Nov 2005 19:55:46 -0800 Subject: Comment pquest SNF 2005-11-08 19:55:42: log book Message-ID: Log book has filled up and needs more pages? Will run: oxygen3; jco2cf4; oxygen3; raldaz2