From nbelov at snf.stanford.edu Tue Sep 13 18:33:04 2005 From: nbelov at snf.stanford.edu (nbelov at snf.stanford.edu) Date: Tue, 13 Sep 2005 18:33:04 -0700 Subject: Shutdown pquest SNF 2005-09-13 18:33:02: Broken wafer in PQuest Message-ID: A silicon wafer was broken in PQuest. After processing wafer failed to unload. Wafer was not broken at this point and I was able to see it clearly. Dummy process being started showed 5.1 sccm He leak. The second attempt to unload wafer was also unsuccessful. During the third attempt to unload the wafer it was hit by the arm and broken. From eenriquez at snf.stanford.edu Wed Sep 14 09:37:50 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Sep 2005 09:37:50 -0700 Subject: Shutdown pquest SNF 2005-09-13 18:33:02: Broken wafer in PQuest Message-ID: Removed broken wafer and wiped down the chamber. Cycled a dummy wafer several times with no problem. Ran O2 clean. From cmfaulkn at snf.stanford.edu Sat Sep 17 12:53:11 2005 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Sat, 17 Sep 2005 12:53:11 -0700 Subject: Shutdown pquest SNF 2005-09-17 12:53:11: found turbo off Message-ID: Found turbo pump off. Pump failed to restart. From eenriquez at snf.stanford.edu Mon Sep 19 08:36:48 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 Sep 2005 08:36:48 -0700 Subject: Shutdown pquest SNF 2005-09-17 12:53:11: found turbo off Message-ID: Turned the mechanical pump back on and restarted the turbo. Ran an O2 plasma with no problems. From jliu at snf.stanford.edu Mon Sep 19 22:28:12 2005 From: jliu at snf.stanford.edu (jliu at snf.stanford.edu) Date: Mon, 19 Sep 2005 22:28:12 -0700 Subject: Problem pquest SNF 2005-09-19 22:28:11: Wafer clamp is in down position in idle mode Message-ID: Maintenance reset is needed. Thanks. /James From eenriquez at snf.stanford.edu Tue Sep 20 08:26:42 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Sep 2005 08:26:42 -0700 Subject: Problem pquest SNF 2005-09-19 22:28:11: Wafer clamp is in down position in idle mode Message-ID: Reset the chamber From nbelov at snf.stanford.edu Tue Sep 20 11:52:02 2005 From: nbelov at snf.stanford.edu (nbelov at snf.stanford.edu) Date: Tue, 20 Sep 2005 11:52:02 -0700 Subject: Problem pquest SNF 2005-09-20 11:52:00: RF generator and recipe editor on PQuest Message-ID: I was not able to use Recipe editor on PQuest tool today. RF generator did not work properly also. I susscessfully did oxygen cleaning (recipe Oxygen) and ran 4 processes using recipe 2NB_CR1. After that I was trying to do another oxygen cleaning using recipe Oxygen3 - the plasma did not strike. After that I did oxygen cleaning using recipe Oxygen (as at the beginning of the work) and tried to start process NBCf4_2. The RF generator showed reflected power equal to forward power (15 W) and it was a blinking message "RF out" on the RF indicator. I did system reset (did not help) and restarted application (did not help). Please, let me know if you need more information. From eenriquez at snf.stanford.edu Tue Sep 20 14:48:18 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Sep 2005 14:48:18 -0700 Subject: Problem pquest SNF 2005-09-20 11:52:00: RF generator and recipe editor on PQuest Message-ID: Rf matching network was hitting its limits. Re-centered caps and ran an O2 clean and the user's recipe with no problems. From johnchoi at snf.stanford.edu Thu Sep 29 11:17:44 2005 From: johnchoi at snf.stanford.edu (johnchoi at snf.stanford.edu) Date: Thu, 29 Sep 2005 11:17:44 -0700 Subject: Comment pquest SNF 2005-09-29 11:17:43: rf power supply Message-ID: Ran oxygen3 pre-cleaning with just carrier wafer to pre-condition/clean chamber. RF power supply had much trouble tuning. Re-centered manually, and checked previous tuning stub values. After turning rf ps off/on tried again. Had to give it a bit of manual help, and then things seemed fine. Not sure if something was wrong, or the tuning was too far off for given recipe. From johnchoi at snf.stanford.edu Thu Sep 29 17:30:30 2005 From: johnchoi at snf.stanford.edu (johnchoi at snf.stanford.edu) Date: Thu, 29 Sep 2005 17:30:30 -0700 Subject: Shutdown pquest SNF 2005-09-29 17:30:29: carrier wafer broken inside Message-ID: From cbaxter at snf.stanford.edu Thu Sep 29 20:03:35 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 29 Sep 2005 20:03:35 -0700 Subject: Shutdown pquest SNF 2005-09-29 17:30:29: carrier wafer broken inside Message-ID: vented chamber , removed broken wafer chips. wet cleaned chamber with water and ipa. i adjusted the clamping force and verified wafer handoff. From cbaxter at snf.stanford.edu Thu Sep 29 21:19:03 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 29 Sep 2005 21:19:03 -0700 Subject: Comment pquest SNF 2005-09-29 11:17:43: rf power supply Message-ID: i ran o2 clean and did not have problen tuning.