Shutdown pquest SNF 2005-09-13 18:33:02: Broken wafer in PQuest

nbelov at snf.stanford.edu nbelov at snf.stanford.edu
Tue Sep 13 18:33:04 PDT 2005


A silicon wafer was broken in PQuest.
After processing wafer failed to unload.
Wafer was not broken at this point and I was able to see it clearly.  Dummy process being started showed 5.1 sccm He leak.
The second attempt to unload wafer was also unsuccessful.
During the third attempt to unload the wafer it was hit by the arm and broken.




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